真空迴焊爐 VSS-300
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真空迴焊爐 VSS-300

貨號: VSS-300 分類: 標籤: , ,
  • 廠牌：德國UNITEMP
  • 應用於使用和不使用助焊劑的回流焊，晶圓凸點和焊球回流，倒裝晶片，外殼的封裝和密封，大功率LED模組，電阻膏燒成，IGBT/DBC，模具附件等。
  • 精確快速的上升和下降率。
  • 最多可接4條氣體管線（質量流量控制器）。
  • 紅外燈加熱。
  • 50個程序，每個程序有50個編程。
  • 上下加熱（軟體選擇）。
  • 3個加熱區可編程。

產品規格

型號VSS-300
最大零件尺寸300 × 300 mm
箱體高度75 mm（可選120 mm）
真空能力10-3 hPa（可選10-6 hPa）
最高溫度450°C
溫度均勻性設定溫度的1 %（在200 mm的晶圓上）
底部加熱紅外線交叉（18 kW）
上升速率150 K /min
下降速率T = 450°C > 200°C：90 K/min，T = 200°C > 100°C：60 K/min
流量控制器1個質量流量控制器用於5 nlm=升/分鐘（最多可選3個）
程序控制SIMATIC® 7英吋觸控螢幕，50個程序，每個程序有50個編程
箱體冷卻水冷
基板冷卻氮氣
尺寸W540 × D690 × H890 mm
重量120 kg
電壓400V/2305V，18 kW

選購配件

項目說明
VSS-MFC-ArAdditional process gas line for Argon (Ar) gas controlled by Mass Flow Controller
VSS-MFC-O2Additional process gas line for Oxygen (O2) gas controlled by Mass Flow Controller
VSS-MFC-FGAdditional process gas line for Forming Gas (max. 10 % H2/N2) gas controlled by Mass Flow Controller
FA IIUpgrade with integrated formic acid module with individually controlled process gas line
FA IIIUpgrade with integrated formic acid module (process gas line shared with base VSS system)
FA IVFormic acid mudule with separate gas line and automatic refilling
FA-TTrap for formic acid vapors
FA-T-2Double Trap for formic acid
VSS-FluxHeatHeated cover for sue with flux for avoiding condensating flux
VSS-FTFlux trap
VSS-FT-2Flux trap
VSS-EHExtended chamber height up to 120 mm, including 65 mm diameter viewing window
VSS-LiftPinsUpgrade with Lift pins for lifting up of single wafer (150 mm, 200 mm or 300 mm diameter)
H2Hydrogen option for use of pure hydrogen gas (100% H2)
H2SSafety hood
TC IUpgrade with additional (flexible) thermocouple (not connected to process control, for external data logging)
TC IIAdditional thermocouple to measure on device (plugged in chamber); for external measurement tool (max. 4 pcs)
VAC IVacuum basic up to 3 hPa incl. vacuum sensor and valve
VAC IIVacuum comfort up to 10-3 hPa incl. vacuum sensor and valve
VSS-RCRemote control of top cover opening and closing, including connection to safety of external cabinet
VSS-SISerial interface between VSS system and external PC using USB 2.0 port and through USB 2.0 cable
MMMoisture measurement
OxAtmospheric oxygen analyser
CABCabinet with integrated Universal Heat Exchanger (UHE)
PTUpgrade with 3 colors pat light
VSS-QPAdditional quartz glass plate at top
VSS-HTExtension of max temperature to 600 °C
VSS-THTop heat (power x2), add. lamp field in the top
VSS-ExOHExtended opening from 200 mm to 300 mm
MPMembrane/diaphragm pump (not chemically resistant)
MPCChemically resistant membrane/diaphragm pump
RVPRotary vane pump for vacuum up to 10exp-3 with oil filter
WC IIIClosed loop water cooling system
UHEUniversal Heat exchanger (as alternative to WC-III, requires cooling water for its primary side)

操作影片

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