| VSS-MFC-Ar | Additional process gas line for Argon (Ar) gas controlled by Mass Flow Controller |
| VSS-MFC-O2 | Additional process gas line for Oxygen (O2) gas controlled by Mass Flow Controller |
| VSS-MFC-FG | Additional process gas line for Forming Gas (max. 10 % H2/N2) gas controlled by Mass Flow Controller |
| FA II | Upgrade with integrated formic acid module with individually controlled process gas line |
| FA III | Upgrade with integrated formic acid module (process gas line shared with base VSS system) |
| FA IV | Formic acid mudule with separate gas line and automatic refilling |
| FA-T | Trap for formic acid vapors |
| FA-T-2 | Double Trap for formic acid |
| VSS-FluxHeat | Heated cover for sue with flux for avoiding condensating flux |
| VSS-FT | Flux trap |
| VSS-FT-2 | Flux trap |
| VSS-EH | Extended chamber height up to 120 mm, including 65 mm diameter viewing window |
| VSS-LiftPins | Upgrade with Lift pins for lifting up of single wafer (150 mm, 200 mm or 300 mm diameter) |
| H2 | Hydrogen option for use of pure hydrogen gas (100% H2) |
| H2S | Safety hood |
| TC I | Upgrade with additional (flexible) thermocouple (not connected to process control, for external data logging) |
| TC II | Additional thermocouple to measure on device (plugged in chamber); for external measurement tool (max. 4 pcs) |
| VAC I | Vacuum basic up to 3 hPa incl. vacuum sensor and valve |
| VAC II | Vacuum comfort up to 10-3 hPa incl. vacuum sensor and valve |
| VSS-RC | Remote control of top cover opening and closing, including connection to safety of external cabinet |
| VSS-SI | Serial interface between VSS system and external PC using USB 2.0 port and through USB 2.0 cable |
| MM | Moisture measurement |
| Ox | Atmospheric oxygen analyser |
| CAB | Cabinet with integrated Universal Heat Exchanger (UHE) |
| PT | Upgrade with 3 colors pat light |
| VSS-QP | Additional quartz glass plate at top |
| VSS-HT | Extension of max temperature to 600 °C |
| VSS-TH | Top heat (power x2), add. lamp field in the top |
| VSS-ExOH | Extended opening from 200 mm to 300 mm |
| MP | Membrane/diaphragm pump (not chemically resistant) |
| MPC | Chemically resistant membrane/diaphragm pump |
| RVP | Rotary vane pump for vacuum up to 10exp-3 with oil filter |
| WC III | Closed loop water cooling system |
| UHE | Universal Heat exchanger (as alternative to WC-III, requires cooling water for its primary side) |
