| RTP-H2 | Hydrogen option with Safety device (Sensor and Hydrogen monitoring) |
| RTP-H2S | Safety device for Hydrogen option (with cover and sensor) |
| RTP-MFC | Additional process gas line with Mass Flow Controller (max. 3 add)*
* = all in all max. 4 process gas lines |
| RTP-Ox | Oxygen Analyzer to measure Oxygen residues (not in combination with Hydrogen Option) |
| RTP-MM | Moisture Analyzer to measure moisture residues in the chamber |
| RTP-SW | Switchbox for chiller and vacuum pump |
| RTP-TC | add. Thermocouple to measure on device (plugged in chamber, max. 1) |
| RTP-VAC I | Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve excl. pump |
| RTP-VAC II | Comfort Vacuum up to 10-3 hPa, Pirani Sensor, vacuum valve, excl. pump |
| RTP-VCR | Tubing made of VCR (welded) |
| RTP-CAB | Oven integrated as floor model into a cabinet with Universal Heat Exchanger |
| RTP-GP-100 | Graphite Plate or susceptor (optional Pyc infiltrated or SiC coated) |
| RTP-PC-100 | add. 100 mm oven chamber = double chamber( for usage of 2 chambers) |
| RTP100-QTW-50 | Quartz tray for 50 mm wafer |
| RTP100-QTW-75 | Quartz tray for 75 mm wafer |
| RTP100-QTW-100 | Quartz Tray for 100 mm wafer |
| RTP100-QTGS-110 | Quartz tray for graphite susceptor 110 mm |
| MP | Membrane/diaphragm pump for vacuum up to 3 hPa |
| RVP | Rotary vane pump or dry pump for vacuum up to 10-3 hPa |
