FA I | Formic Acid Module – with Mass Flow Controller (external module – able for later retrofit) |
FA II | Formic Acid Option with internal gas line and Mass Flow Controller |
FA III | Formic Acid Option, the gas line is shared with the standard Nitrogen Mass Flow Controller |
FT | Flux trap (for pump protection) |
H2 | Hydrogen option with Safety device (Sensor and Hydrogen monitoring) |
H2S | Safety device for Hydrogen option (with cover and sensor) |
IL | Interlock mechanism to prevent unintentional opening of the chamber during process |
MFC | Additional process gas line with Mass Flow Controller (max. 3 add. – depending on model) |
MM | Moisture Analyser to measure moisture residues in the chamber |
OxAtAn | Oxygen Analyser to measure Oxygen residues (not in combination with Hydrogen Option) |
PT | Additional 3 colors pat light |
SW | Switchbox |
TC | add. Thermocouple to measure on device (plugged in chamber, max. 3 depending on model) |
VAC I | Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve DN16, ball check valve |
VAC II | Comfort Vacuum up to 10exp-3 hPa, Pirani Sensor, vacuum valve DN16, ball check valve |