Rapid Thermal Vacuum Process Oven RTP-100

Brand：德國UNITEMP
Implantation/Contact Annealing, RTP, RTA, RTO, RTN, Operation with inert gases, Oxygen, Hydrogen, Forming gas, SiAu, SiAl, SiMo Alloying, Low-k dielectrica, Crystallization & densification
Precise ramp up and fast ramp down rates
Excellent temperature uniformity
Up to 4 gas lines (Mass Flow Controller)
Integrated data logging
SIMATIC^®controller
Heated by Infrared Lamps
50 programs with 50 steps each
Small foot print

Specification

Model	RTP-100
Max. part size	100 mm diameter
Chamber size	134 × 169 × 18 mm
Vacuum Capability	10^-3 hPa（可選10^-6 hPa）
Max. Temperature	1200°C
Temp. uniformity	≤ ± 1.5 % of set temperature
Heating	Top and bottom heating with 18 IR Lamps (20 kW)
Ramp up rate	Up to 150 K/sec
Ramp down rate	T= 1200 °C > 400 °C：200 K/min，T= 400 °C > 100 °C：30 K/min
Flow Controller	Mass Flow Controller (Nitrogen 5 nlm)
Chamber Cooling	Water cooled
Substrate Cooling	By Nitrogen Gas
Electrical connection	400/230 V，20 kW
Dimension	504 × 505 × 570 mm
Weight	約55 kg

Item	Description
RTP-H2	Hydrogen option with Safety device (Sensor and Hydrogen monitoring)
RTP-H2S	Safety device for Hydrogen option (with cover and sensor)
RTP-MFC	Additional process gas line with Mass Flow Controller (max. 3 add)* * = all in all max. 4 process gas lines
RTP-Ox	Oxygen Analyzer to measure Oxygen residues (not in combination with Hydrogen Option)
RTP-MM	Moisture Analyzer to measure moisture residues in the chamber
RTP-SW	Switchbox for chiller and vacuum pump
RTP-TC	add. Thermocouple to measure on device (plugged in chamber, max. 1)
RTP-VAC I	Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve excl. pump
RTP-VAC II	Comfort Vacuum up to 10^-3hPa, Pirani Sensor, vacuum valve, excl. pump
RTP-VCR	Tubing made of VCR (welded)
RTP-CAB	Oven integrated as floor model into a cabinet with Universal Heat Exchanger
RTP-GP-100	Graphite Plate or susceptor (optional Pyc infiltrated or SiC coated)
RTP-PC-100	add. 100 mm oven chamber = double chamber( for usage of 2 chambers)
RTP100-QTW-50	Quartz tray for 50 mm wafer
RTP100-QTW-75	Quartz tray for 75 mm wafer
RTP100-QTW-100	Quartz Tray for 100 mm wafer
RTP100-QTGS-110	Quartz tray for graphite susceptor 110 mm
MP	Membrane/diaphragm pump for vacuum up to 3 hPa
RVP	Rotary vane pump or dry pump for vacuum up to 10^-3hPa