Reflow Solder Oven with Vacuum RSO-210

Brand：德國UNITEMP
Application: Reflow Solder Processes without flux, Operation with inert gas, Oxygen, Hydrogen, Forming gas, Formic Acid, Lead and Lead-free SMT reflow, High temperature ceramic/alumina hybrid reflow, Pin-in-paste reflow, Semiconductor, LED attach etc.
Precise ramp up and fast ramp down rates
Up to 4 gas lines
Heated by Infrared Lamps
50 programs with 50 steps each
Integrated data logging
Incl. Quartz glass universal holder and graphite susceptor

Specification

Model	RSO-210
Max. part size	210 mm x 210 mm or 8” wafer
Chamber Height	40 mm
Part holder	Quartz glass holder with Graphite suszeptor (160 x 160 mm)
Vacuum Capability	10^-3 hPa
Max. Temperature	650°C
Temp. uniformity	≤ ± 1 % of set temperature
Ramp up rate	Up to 10 K/sec
Ramp down rate	T = 650°C > 400°C：200 K/min，T = 400°C > 100°C：30 K/min
Flow Controller	Mass Flow Controller (Nitrogen 5 nlm= norm liter per minute)
Controller	7“ touch panel, 50 programs storable each with 50 segments
Chamber Cooling	Water cooled
Substrate Cooling	By Nitrogen Gas
Dimension	W578 × D505 × H570 mm
Weight	55 kg
Voltage	3 x 400 V, 3P, +N+PE, 11 kW 或 3 x 208 V, 3P+PE, 10 kW

Item	Description
FA II	Formic Acid Option with internal gas line and Mass Flow Controller
FA III	Formic Acid Option , the gas line is shared with the standard nitrogen Mass Flow Controller
FA-IV	Integrated formic acid module with separate MFC for carrier gas (N₂) with automatic refilling
FA-T	Trap for formic acid vapor (for pump protection)
FT	Flux trap (for pump protection)
MFC	Additional process gas line with Mass Flow Controller (max. 3 add) *
MM	Moisture Analyser to measure moisture residues in the chamber
OxAtAn	Oxygen Analyser to measure Oxygen residues (not in combination with Hydrogen Option)
PT	Additional 3 colors pat light
SW	Switchbox for chiller and/or vacuum pump
TC	add. Thermocouple to measure on device (plugged in chamber, (max. 3)
VAC I	Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve DN16 , ball check valve
VAC II	Comfort Vacuum up to 10³hPa, Pirani Sensor, vacuum valve DN16, ball check valve
UHE (50 Hz)	Oven integrated as floor model into a cabinet with Uni. Heat Exchanger