Specification
Model | MS-1 |
Loading area | for wafer size up to 8" or substrate size 200 x 200 mm |
X/Y adjustment | by micrometer screw and X-Y table |
Vision-alignment System | camera with 5 Megapixel |
Vacuum | with integrated vacuum pump and chuck |
Dimension | 400 × 500 × 352 mm |
Weight | 25 kg |