High Vacuum Sealer with 2 Heating Zones 2Z-HVS-100

  • Brand:德國UNITEMP
  • Application: Sealing and thermic encapsulation of MEMS (Micro-Electro-Mechanical Systems), Getter activation (Deposition of reactive material that is placed inside a vacuum system), Component separation during thermal processing in 2 temperature zones
  • Up to 4 internal gas lines
  • Data logging
  • Double stage rotary vane pump for vacuum up to 10-6 hPa。
  • SIMATIC®controller
  • Optical process control by 360 °C

Specification

Model2Z-HVS-100
Heating Area100 mm diameter
AdapterMax. 6 pcs
Substrate SizeMax. 16 mm dia.
Vacuum Capability10-6 hPa(包含泵)
Max. Temperature頂部450°C,底部200°C
Ramp up rate20 K /min(真空中)
Ramp down rate20 K /min(真空中)
DimensionW200 × D500 × H470 mm
Weight24 kg(包含泵)
Voltage230 V AC, 1P, 50-60 Hz, max. 16 A, 3.2 kW

Video

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