Specification
Model | 2Z-HVS-200 |
Heating Area | 200 mm diameter |
Adapter | Max. 6 pcs |
Substrate Size | Max. 42 mm dia. |
Vacuum Capability | 10-6 hPa(包含泵) |
Max. Temperature | 頂部450°C,底部200°C |
Ramp up rate | 20 K /min(真空中) |
Ramp down rate | 20 K /min(真空中) |
Dimension | W805 × D500 × H820 mm |
Weight | 105 kg(包含泵) |
Voltage | 230/400 V AC, 3P, +N, 50-60 Hz, max. 3 × 16 A, 9 kW |