FA II | Formic Acid Option with internal gas line and Mass Flow Controller |
FA III | Formic Acid Option , the gas line is shared with the standard nitrogen Mass Flow Controller |
FA-IV | Integrated formic acid module with separate MFC for carrier gas (N2) with automatic refilling |
FA-T | Trap for formic acid vapor (for pump protection) |
FT | Flux trap (for pump protection) |
MFC | Additional process gas line with Mass Flow Controller (max. 3 add) * |
MM | Moisture Analyser to measure moisture residues in the chamber |
OxAtAn | Oxygen Analyser to measure Oxygen residues (not in combination with Hydrogen Option) |
PT | Additional 3 colors pat light |
SW | Switchbox for chiller and/or vacuum pump |
TC | add. Thermocouple to measure on device (plugged in chamber, (max. 3) |
VAC I | Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve DN16 , ball check valve |
VAC II | Comfort Vacuum up to 103hPa, Pirani Sensor, vacuum valve DN16, ball check valve |
UHE (50 Hz) | Oven integrated as floor model into a cabinet with Uni. Heat Exchanger |